| Author | A.M. Maniatty, O. Klaas, Y. Liu |
|---|---|
| Title | Heterogeneous Stresses in Thin Polycrystalline Films on Substrates |
| Year | 2000 |
| Journal | Plastic ans Viscoplastic Response of Materials and Metal Forming |
| Pages | 635-637 |
| Publisher | Neat Press |
| Editor | A. Khan, H. Zhang, Y. Yuan |
| Abstract | Computational models for predicting stresses in thin polycrystalline films, such as found in electronic interconnects and MEMS, are being developed. The stresses and stress gradients that arise due to thermal conditions have a big influence on reliability. The model is based on a thermo-elasto-viscoplastic crystal model modified to account for interactions between the film and substrate, the fil and passivation layer, and neighboring grains. The model is implemented into a finite element framework. |