| Author | C. Zheng, G. P. S. Balasubramanian, Y. Tan, A. M. Maniatty, R. Hull, J. T. Wen |
|---|---|
| Title | Simulation, micro-fabrication and control of a micro-heater array designed for adaptive control of materials microstructure |
| Year | 2017 |
| Journal | IEEE/ASME Trans Mechatronics |
| Volume | 22 |
| Pages | 1914-1919 |
| Issue | 4 |
| Abstract | This paper describes the simulation, fabrication and feedback control of a micro-heater array, designed for the implementation of real-time control during thermal evolution of microstructure. The ten-channel heating array was designed through finite element simulation and micro-fabricated to be compatible with in-situ imaging in a scanning electron microscope. Control algorithms are implemented that demonstrate cooperative control of the temperature (using calibrated Ti heater line resistances as a proxy) across the set of channels in the array. The goal of this system is to be able to generate controlled thermal, and thus microstructural and property distribution during processing of polycrystalline materials. |
| PDF File |  Download |
| DOI Link | 10.1109/TMECH.2017.2650682 |